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What does SACVD stand for?

SACVD stands for Sub Atmospheric Chemical Vapor Deposition

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Method to avoid dishing in forming trenches for; Sub atmospheric chemical vapor deposition; of forming trenches for shallow trench isolation in...
the use of sub-atmospheric chemical vapor deposition oxide Authorized licensed use limited to: Univ of Calif Berkeley. Downloaded on July 27...
Ellie Yieh was named corporate vice president; she delivered significant profitability and market share growth for Sub-Atmospheric Chemical Vapor Deposition...
CMP process development for the via-middle 3D TSV applications at 28 nm technology node; barrier/sub-atmospheric chemical vapor deposition (SACVD)...
This paper reports an improved densification anneal process for sub-atmospheric chemical vapor deposition (SACVD)-based shallow trench isolation (STI)...
And how it generates electricity.?; (sub atmospheric chemical vapor deposition); Can someone tell me what is a semiconductor? And how it generates...
As process of record we opted for a sub-atmospheric chemical vapor deposition (SACVD); After TSV CMP the wafers continue through the BEOL processing...
Sub-Atmospheric Chemical Vapor Deposition (SACVD) see LPCVD. Subcollector See Buried Layer. Submicron Dimensions smaller than one micron. Substrate
with a sub-atmospheric chemical vapor deposition (SACVD) tool for; proportion of its total order book compared to Applied Materials or KLA...
(PECVD), low pressure chemical vapor deposition (LPCVD), sub-atmospheric chemical vapor deposition (SACVD), and the like. In an exemplary embodiment...
thick oxide at the bottom of a trench formed in a semiconductor substrate includes forming a conformal oxide film by a sub-atmospheric chemical vapor deposition...
SACVD: Meaning of Acronym Language Category; Sub Atmospheric Chemical Vapor Deposition: Acronym in English: General, Common Abbreviation, Slang, Acronym
(PECVD) and a sub-atmospheric chemical vapor deposition (SACVD). The models for PECVD and. 342 Fig. 2. View of the TSV structure and rotation axis for two...
Conversion from Helium to Nitrogen as a TEOS Carrier Gas in Sub-Atmospheric Chemical Vapor Deposition: Tatsunori Murata: Renesas: 14:15...
A Sub-Atmospheric Chemical Vapor Deposition Process for Deposition of Oxide Liner in High Aspect Ratio Through Silicon Vias application/pdf Lisker...
A method of film deposition in a sub-atmospheric chemical vapor deposition (CVD) process includes (a) providing a model for sub-atmospheric
Plasma Enhanced Chemical Vapor Deposition (PECVD), and Sub-Atmospheric Chemical Vapor Deposition (SACVD). This work included defining...
A SiO2 layer was formed at the bottom and on the sidewall of the Si trenches by sub-atmospheric chemical vapor deposition (SACVD) method using...
Evaluation of Ozone Emissions Destruction; in the sub-atmospheric chemical vapor deposition; of Ozone Emissions Destruction Units for Applied...
A sub-atmospheric chemical vapor deposition process for deposition of oxide liner in high aspect ratio through silicon vias. Lisker, Marco and Marschmeyer, Steffen...
A Sub-Atmospheric Chemical Vapor Deposition Process for Deposition of Oxide Liner in High Aspect Ratio Through Silicon Vias
View This Abstract Online; A sub-atmospheric chemical vapor deposition process for deposition of oxide liner in high aspect ratio through silicon vias.
A method of film deposition in a sub-atmospheric chemical vapor deposition; control of sub-atmospheric chemical vapor deposition processes...
Sub-Atmospheric Chemical Vapor Deposition of SiO 2 for Dielectric Layers in High Aspect Ratio TSVs
A sub-atmospheric chemical vapor deposition process for deposition of oxide liner in high aspect ratio through silicon vias.
Sub-Atmospheric Chemical Vapor Deposition of SiO2 for...
Sub-atmospheric chemical vapor deposition (SACVD) of TEOS-ozone USG and BPSG
A Sub-Atmospheric Chemical Vapor Deposition Process for Deposition of Oxide Liner in High Aspect Ratio Through Silicon Vias. Marco Lisker, Steffen Marschmeyer...
A method of film deposition in a sub-atmospheric chemical vapor deposition (CVD) process includes (a) providing a model for sub-atmospheric CVD deposition of a film...
Title: Feedback control of sub-atmospheric chemical vapor deposition processes. Abstract: A method of film deposition in a sub-atmospheric chemical vapor deposition...
Recent bibliographic sampling of Robert Herrick patents listed; a conformal oxide film by a sub-atmospheric chemical vapor deposition process that fills...
mobility and makes it insensitive to stress. The use of sub-atmospheric chemical vapor deposition oxide (SACVD) for trench isolation further reduces stress effects.