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What does SMS stand for?

SMS stands for Semiconductor Metrology Systems

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Samples in periodicals archive:

Carl Zeiss Semiconductor Metrology Systems division provides solutions for photomask yield improvement and mask recovery through repair and verification of photo...
ZYGO's semiconductor metrology systems enable manufacturers to improve the quality and yield of their processes, while lowering metrology costs.
Job Opening: The Semiconductor Metrology Systems division of Carl Zeiss SMT has an immediate opening for an Application Engineer, located in Santa Clara, CA, and...