This definition appears very rarely
See other definitions of SMS
Samples in periodicals archive:
The High-Speed SECS Message Services (HSMS) protocol is a standard transport protocol for communication between computers in semiconductor factories.
Introduction to SECS/GEM Standard. SECS (SEMI Equipment Communication Standards) and GEM; SEMI E37 HSMS - High Speed SECS Message Services.
SECS Message Services (HSMS) Generic Services. The results of this ballot will be discussed at the next I&C committee meeting on November 1, 2007
Learn about products Cimetrix offers to supprot SECS/GEM. Cimetrix Incorporated Support Login. Products; E37 High-Speed SECS Message Services