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What does Q-CAP stand for?

Q-CAP stands for Qualification Cluster for Advanced Photomasks

This definition appears very rarely

Samples in periodicals archive:

Abstract The reduction of; the Qualification Cluster for Advanced Photomasks, comprising different inspection tools (a photomask defect inspection station...
the Qualification Cluster for Advanced Photomasks, comprising different inspection tools (a photomask defect inspection station, a CD metrology system...